Deposition and characterization of undoped and Al doped Zinc Oxide thin films using spray pyrolysis technique

Abstract

glass substrates at 400°C by Spray Pyrolysis technique. The structural and optical proprieties of sprayed thin films has been investigated. Structural analysis was carried out using X-ray diffraction. The optical properties were studied by mean of UV–visible spectrophotometry. The structural analysis indicates the presence of a single ZnO phase with a wurzite structure. The sprayed films show a preferred growth orientation along c-axis, which is perpendicular to the substrate. The optical transmittance spectra show a high transmission of films in the visible region.